Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
نویسندگان
چکیده
منابع مشابه
Macroparticles in films deposited by steered cathodic arc
The macroparticle content of titanium films deposited using a steered vacuum cathodic arc has been investigated. It has been found that the macroparticle number decreases with increasing steering magnetic field strength, and experimental results are found to be consistent with the model in which the number and mass of macroparticles arising from a cathode spot are proportional to the cathode sp...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2014
ISSN: 1742-6596
DOI: 10.1088/1742-6596/511/1/012070